Indium Phosphide Single-Crystal Furnace (VGF)

Main parameters

Cavity parameters

● Form: Vertical

● Compatible crystal size: 6 inches

● Design pressure: 5 MPa (in accordance with the National Standard of the People’s Republic of China, “Pressure Vessels” (GB 150.1–150.4–2011); Party B shall provide a complete set of design qualifications for pressure vessels and relevant supporting documents).

● Mechanical safety valve opening pressure: 3.5 MPa

● Cavity Water Cooling: Employs a helical cooling water circuit for uniform and highly efficient cooling.

● Process pressure: 2.75 MPa

● End-cap locking: Equipped with a dedicated locking tool and employing manual tightening, ensuring reliable sealing.

● High-pressure chamber overpressure protection: Equipped with a high-precision safety valve to provide automatic overpressure protection.

● Rotation angle: Adjustable between 45° and 90°, facilitating operation and maintenance.

Heating Furnace Parameters

● Heating and cooling rates: Automatically adjusted based on the temperature difference between the setpoint and the actual temperature, adapting to various process requirements.

● Temperature control zones: 5 zones, with high temperature-control accuracy and uniform thermal field.

● Heating wire configuration: helical winding with tapped leads, ensuring uniform heating and long service life.

● Heating electrode: The heating electrode passes through the flange and has been treated with high-temperature insulation to eliminate the risk of electrical leakage.

Temperature control

● Maximum operating temperature: 1300℃

● Heating rate: 0–15°C/min, adjustable as needed

● Alarm Detection: Equipped with an anomaly alarm function, it emits audible and visual alarm signals to promptly alert operators to troubleshoot faults, ensuring the safety of both equipment and personnel.

● Control method: Computer + PLC + high-precision intelligent temperature controller, enabling automated and precise temperature control; supports GEM/SECS communication, can interface with the EAP system, and allows remote process download.