Soft-landing Diffusion System
Sunredveichi is committed to providing you with High-Quality Semiconductor Processing Equipment
The soft-landing diffusion system utilizes end-deceleration control and high-precision positioning, which significantly reduces the risk of mechanical damage to wafers during high-temperature processes. it is darticularly suitable for the manutacturing scenarios of high-value wafers and brittle materials, capable of enhancing the overall production yield and reducing material losses.
Main Parameters
● Applicable Wafer Size: 4-8 inches (with compatibility design)
● Temperature Range: 600-1300℃ (maximum controllable temperature rise up to 1300℃)
● Temperature Control Accuracy: ±0.5℃
● Constant-temperature Zone Length: 300-1500mm
● MFC Gas Control Accuracy: ±0.5% F.S, and the gas path has a slow - start function
Core Technological Advantages
Full Automation Control
● SECS/GEM Integration: Equipped with a standard SECS/GEM communication interface, it can seamlessly connect to the factory automation svstem, enabling real- time monitoring of equipment status, remote parameter adjustment, and efficient exchange of production data, thus providing asolid foundation for inteligent manufacturing.
Anti-fragmentation Design
● It uses flexible deceleration and precise positioning technology. When the boat-pushing/pulling mechanism approaches the end of the process tube, it automatically decelerates to prevent thesilicon wafers from breaking due to sudden stops or colisions.
● The fragmentation rate can be reduced to less than 0.1% (the fragmentation rate of traditional hard-landing systems is usually more than 1%).
High-precision Control
● The speed range of the boat pushing/puling mechanism is 20-1000 mm/min, and the speed control accuracy reaches ±0.5 mm/min, which can meet the feeding rhythm requirements of diferent processes.
Compatibility and Stability
● It supports the compatible transfer of 4-8 inch silicon wafers and is adaptable to various types of boats(such as quartz boats and silicon carbide boats).
● It uses a servo motor + encoder feedback system, and the long-term running position repeatability accuracyis is ≤+0.5 mm.
Intelligent Linkage
● It is in real-time linkage with the furnace tube temperature and gas flow control systems to ensure the synchrony of the process.
● lt has a function of abnormal vibration monitoring, which can automatically trigger the shutdown protection.
High-Precision Temperature Control
● Temperature Control Accuracy: The temperature control accuracy reaches ±0.5°C, and the single-pointtemperature stabilityis ±0.5°C/24 hours.
● Control Modes: Supports cascade control and automatic adjustment of the constant-temperature zone.
● Thermocouple Technology: Employs S/R type thermocouples and cold-junction temperature compensation technology to reduce environmental interference.
High-quality semiconductor processing equipment manufacturer, Everything for the sake of the customer
Tel: +86-18660296696(Mr. Zhang)
+86-18661720798(Mr.Liu)
Address: No. 33 Xianshan East Road, Chengyang District, Qingdao City, Shandong Province, China
