Anneal Furnace
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  • Anneal Furnace

Anneal Furnace

Sunredveichi is committed to providing you with High-Quality Semiconductor Processing Equipment

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Main Parameters

● Quantity of process tube: 1-4 tubes/set

● Working temperature range: 200~800℃

● Length of constant temp. zone: 300~1100mm

● Single point temperature stability: ±1℃/24h

● Max heating rate: 15℃/min

 

Features of Equipments

● Automatic control operation for processing recipe.>

● Smart heating and cooling ramp control.

● Storing multiple groups of PID parameters.

● System malfunction detection alarm System tolerance calibration(single or multiple point dynamic calibration).

● Resume running at break point after power-off.

● This system can be adjusted or developed according to the special requirements of customers.

● Supporting SECS/GEM Communication.

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