Anneal Furnace
Sunredveichi is committed to providing you with High-Quality Semiconductor Processing Equipment
Main Parameters
● Quantity of process tube: 1-4 tubes/set
● Working temperature range: 200~800℃
● Length of constant temp. zone: 300~1100mm
● Single point temperature stability: ±1℃/24h
● Max heating rate: 15℃/min
Features of Equipments
● Automatic control operation for processing recipe.>
● Smart heating and cooling ramp control.
● Storing multiple groups of PID parameters.
● System malfunction detection alarm System tolerance calibration(single or multiple point dynamic calibration).
● Resume running at break point after power-off.
● This system can be adjusted or developed according to the special requirements of customers.
● Supporting SECS/GEM Communication.