Vacuum Alloy Furnace
Sunredveichi is committed to providing you with High-Quality Semiconductor Processing Equipment
Main Parameters
● Types: Single tube horizontal furnace
● Feeding method: manual or automatic
● Furnace body movement: automatic control (the furnace body has the function of automatically closing the door when moving the chamber)
● Working temperature range:300~1000℃
● Length of temp. zone: >300mm
● Temp. Zone accuracy: ±1℃
● Max heating rate: ≥15℃/min
● Max cooling rate: >3℃/min
● Quartz boat: Loading quantity>50 pieces
● Chamber cooling: Air cooling at the bottom of the chamber
● Vacuum: better than 1*10-3Pa (cold state)
● Vacuum chamber leakage rate: ≤0.667Pa/h(cold state)
● Vacuum pumping time: ≤15 minutes (startup), ≤5 minutes (high vacuum working state)