Vacuum Alloy Furnace
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  • Vacuum Alloy Furnace

Vacuum Alloy Furnace

Sunredveichi is committed to providing you with High-Quality Semiconductor Processing Equipment

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Main Parameters

● Types: Single tube horizontal furnace

● Feeding method: manual or automatic

● Furnace body movement: automatic control (the furnace body has the function of automatically closing the door when moving the chamber)

● Working temperature range:300~1000℃

● Length of temp. zone: >300mm

● Temp. Zone accuracy: ±1℃

● Max heating rate: ≥15℃/min

● Max cooling rate: >3℃/min

● Quartz boat: Loading quantity>50 pieces

● Chamber cooling: Air cooling at the bottom of the chamber

● Vacuum: better than 1*10-3Pa (cold state)

● Vacuum chamber leakage rate: ≤0.667Pa/h(cold state)

● Vacuum pumping time: ≤15 minutes (startup), ≤5 minutes (high vacuum working state)

 

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