Oxygen-free Oven
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Oxygen-free ovens are used in processessuch as dust-free drying of semiconductors .During the operation of the equipment, the oxygen content in the chamber is set. The system automatically activates the supply of N2 according to the oxygen content in the chamber,controlling the oxygen content within the set range.This prevents the materials from being oxidized during the baking process.
Main Parameters
● Temperature range: RT+25 to 500°C
● Maximum temperature: 500°C
● Operating temperature: 450°C, operating duration: 30 hours
● Display accuracy: ±0.1°C
● Oxygen content: <5 ppm(oxygen evacuation time<60 minutes)
● Cooling method: Water-cooled, with a maximum cooling rate of 2°C/min